Enhanced-throughput Combinatorial Material synthesis and Analysis Facility (CMAF) of Forschungszentrum Jülich GmbH (FZJ) PVD-facility allowing a 2D combinatorial materials synthesis with up to four distinct educt sources and a subsequent rapid chemical (GD-OES) and crystallographic (Raman) analysis based on autosampler technologies.
State of the art: Synthesis of inorganic thin-film materials libraries with desired compositional and/or layer thickness gradients as well as chemical and structural investigation of the deposited libraries.
Services currently offered by the infrastructure: CMAF offers support in selection and preparation of sputter targets from required educt materials, library processing as well as analytics of the deposited thin-film libraries. It can be applied to inorganic (metallic, ceramic, cermet) material systems for e.g. solid state batteries or high temperature CO2 reduction.